Sub-Wavelength Holographic Lithography
Home
Publications
FAQ
Contact us
About us
Overview
SWHL features
High tolerance to mask defects
Virtual optimization
3D imaging with single exposure
Simple holographic stepper
Various designs of holographic mask
Inexpensive mask
Multipatterning example
What is holography
Experimental proof of concept
Demonstrator
SWHL Demonstrator presentation
Non-flat imaging experiment
Flat imaging experiment
Publications
FAQ
Testimonials
Contact us
Non flat imaging experiment
Initial design.
3D structure (prestructured wafer)
Depth of grooves: 100um
Size: 2.5mm x 2.5mm
Resolution: 1um
Holographic mask (top view)
Aerial images, digital microscope
bottom plane
top plane
Copyright(c) 2021 SWHL GmbH