Publications
- Sub-wavelength holographic lithography (SWHL) // SPIE Advanced Lithography, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
- Experimental verification of sub-wavelength holographic lithigraphy (SWHL) concept // SPIE Advanced Lithography, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
- Mathematical problems of holographic mask synthesis // SPIE Advanced Lithography, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
- Maskless holographic schemes based on phase micromirror SLMs // SPIE Advanced Lithography, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
- Sub‐Wavelength Holographic Lithography technology for production of non‐planar 3D holographic images // Micro and Nano Engineering, 2018
- Experimental verification of Sub-Wavelength Holographic Lithography physical concept for single exposure fabrication of complex structures on planar and non-planar surfaces // SPIE, 33rd European Mask and Lithography Conference, 2017
- Sub-Wavelength Holographic Lithography (SWHL) for Fabrication IC & MEMS Topologies on Non-Planar Surfaces by Single Exposure // 39th International Conference on Micro and Nano Engineering, 2013
- Phase-shift at sub-wavelength holographic lithography (SWHL) // 28th European Mask and Lithography Conference (EMLC 2012), 2012
- Analysis of Effect of Perturbations in SWHM and Illuminating Optical Scheme Parameters on Aerial Images (Poster)
- Analysis of an Effect of Perturbations in SWHM and Illuminating Optical Scheme Parameters on an Aerial Images // Advanced Semiconductor Manufacturing Conference (ASMC), 23rd Annual SEMI, 2012
- Методы создания и коррекции качества голографических изображений геометрических объектов с элементами субволновых размеров (.pdf) [in Russian]
- В.А. Боровиков "Математика, лежащая в основе голографии, как я её понимаю" (.pdf) [in Russian]
Patents
