Sub-Wavelength Holographic Lithography
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Overview
SWHL features
High tolerance to mask defects
Virtual optimization
3D imaging with single exposure
Simple holographic stepper
Various designs of holographic mask
Inexpensive mask
Multipatterning example
What is holography
Experimental proof of concept
Demonstrator
SWHL Demonstrator presentation
Non-flat imaging experiment
Flat imaging experiment
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The demonstrator
λ=441.6nm
NA=0.24
Resolution: 2um
Image area: 2.5mm x 2.5mm
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