SWHL: Main Features

Compared to the projection photolithography, there are some distinguishing features of SWHL imaging:

Comparison with projection photolithography


Projection photolithography with a deep ultraviolet light source (known as "DUVL") is based on geometrical optics concept:


SWHL is based on light wave optics concept:

SWHL is able to generate any kind of images that common projection lithography generates, and those that projection lithography cannot. All the RET (Resolution Enhancement Technologies) of common photolithography (i.e. OPC, Phase-Shift, Multi-Patterning, SMO, etc.) are successfully performed in SWHL as a method of HoloOptimization.