About us Overview SWHL features High tolerance to mask defects Virtual optimization 3D imaging with single exposure Simple holographic stepper Various designs of holographic mask Inexpensive mask Multipatterning example What is holography Experimental proof of concept Demonstrator SWHL Demonstrator presentation Non-flat imaging experiment Flat imaging experiment Publications FAQ Testimonials Contact us

Multipatterning example

SWHL can be used with any type of multipatterning. This is an example (computational only) of LELELE multipatterning.

Initial layout

Decomposition

SWHM

Aerial images


Process



Result